Nd:YAG激光器切割金刚石膜的特性研究 |
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引用本文: | 顾长志 金曾孙. Nd:YAG激光器切割金刚石膜的特性研究[J]. 光学学报, 1997, 17(10): 469-1471 |
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作者姓名: | 顾长志 金曾孙 |
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作者单位: | 吉林大学超硬材料国家重点实验室 |
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摘 要: | 采用Nd:YAG激光器对金刚石膜进行切割,研究了激光器在不同输出功率下切割金刚石膜的速率和切割深度与时间的关系,以及Nd:YAG激光器切割的金刚石膜在成份和形状上的变化特点,给出了比较理想的切割工艺条件。
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关 键 词: | Nd:YAG 激光器 金刚石膜 切割 |
收稿时间: | 1996-08-31 |
Ablation Characteristics of Diamond Film by Nd:YAG Laser |
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Abstract: | Dimond film was cut by a Nd:YAG laser and the ablation rate and characteristics were studied. An ideal condition of ablation for dimaond film was discussed. |
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Keywords: | Nd:YAG laser diamond film ablation |
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