| 镁/钛离子注入对蓝宝石微结构和机械性能的影响 |
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| 引用本文： | 张海亮,张明福,韩杰才,侯永昭,杨雯.镁/钛离子注入对蓝宝石微结构和机械性能的影响[J].人工晶体学报,2020,49(2):195-204. |
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| 作者姓名： | 张海亮 张明福 韩杰才 侯永昭 杨雯 |
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| 作者单位： | 中国电子信息产业发展研究院,材料工业研究所,北京 100846;哈尔滨工业大学,复合材料与结构研究所,哈尔滨 150080;山东理工大学材料科学与工程学院,淄博 255000;山东理工大学交通与车辆工程学院,淄博 255000 |
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| 基金项目： | National Natural Science Foundation of China(11002043);Fundamental Research Funds for the Central Universities(HIT.KLOF.2010028)。 |
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| 摘 要： | 离子注入已被证明是改善蓝宝石光学和机械表面性能的一种可靠方法.本文选择不同能量和剂量的镁/钛离子注入蓝宝石.利用TRIM(Transport of Ion Matter)程序分析了镁/钛离子在蓝宝石晶体中的射程分布.利用拉曼光谱和掠入射X射线衍射分析了损伤层深度和微结构变化.离子注入结果显示,蓝宝石的纳米硬度、纳米划痕和红外性能等均呈现出可调节的特性.
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| 关 键 词： | 离子注入 蓝宝石 表面改性 |
Effect of Magnesium/Titanium Ions Implantation on the Microstructure and Mechanical Properties of Sapphire |
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| ZHANG Hailiang,ZHANG Mingfu,HAN Jiecai,HOU Yongzhao,YANG Wen.Effect of Magnesium/Titanium Ions Implantation on the Microstructure and Mechanical Properties of Sapphire[J].Journal of Synthetic Crystals,2020,49(2):195-204. |
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| Authors: | ZHANG Hailiang ZHANG Mingfu HAN Jiecai HOU Yongzhao YANG Wen |
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| Institution: | (Department of Material Industry Research,China Center of Information Industry Development,Beijing 100846,China;Center for Composite Materials,Harbin Institute of Technology,Harbin 150080,China;School of Materials Science and Engineering,Shandong University of Technology,Zibo 255000,China;School of Transportation and Vehicle Engineering,Shandong University of Technology,Zibo 255000,China) |
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| Abstract: | Ions implantation has proven to be a reliable way for sapphire to create new optical and mechanical surface properties.In this paper,the magnesium/titanium ions were chosen to implant in the surface modification of sapphire with different ions energy and fluence.The projected range and straggling of ions were calculated by simulation program of the Transport of Ion Matter code.Information about the damage depth distribution and the occurrence of microstructural modifications were analyzed by Raman spectroscopy and glancing incidence X-ray diffraction.According to the test results,the nanohardness,nanoscratch and infrared properties of sapphire show a tunable property with the ion implantation. |
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| Keywords: | ions implantation sapphire surface modification |
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