| Si和GaAs衬底上的ZnTe、CdTe分子束外延材料的晶向倾角 |
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| 引用本文： | 王元樟,陈路,巫艳,吴俊,于梅芳,方维政,何力.Si和GaAs衬底上的ZnTe、CdTe分子束外延材料的晶向倾角[J].人工晶体学报,2005,34(4):649-652. |
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| 作者姓名： | 王元樟 陈路 巫艳 吴俊 于梅芳 方维政 何力 |
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| 作者单位： | 中国科学院上海技术物理研究所,功能材料与器件研究中心,上海,200083;中国科学院研究生院,北京,100039;中国科学院上海技术物理研究所,功能材料与器件研究中心,上海,200083 |
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| 基金项目： | 国家自然科学基金（No.60221502）资助项目 |
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| 摘 要： | 本文采用X射线双晶衍射二次测量法对φ76mm Si(211)和GaAs(211)B衬底上生长的ZnTe和CdTe外延层的晶向倾角进行了测量,发现对于Si和GaAs衬底,外延层的211]均绕外延层与衬底的0-11]复合轴朝111]倾斜,其晶向倾角与晶格失配呈线性关系;通过实际测量验证了在外延层探测到的133]峰代表211]关于111]旋转180°的255]孪晶向.
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| 关 键 词： | 分子束外延 晶格失配 晶向倾角 孪晶 |
| 文章编号： | 1000-985X（2005）04-0649-04 |
| 收稿时间： | 11 25 2004 12:00AM |
| 修稿时间： | 2004-11-252004-12-09 |
Tilted Angels of ZnTe and CdTe Epilayers Grown on Si(211) and GaAs(211)B Substrates by MBE |
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| WANG Yuan-Zhang,CHEN Lu,WU Yan,WU Jun,YU Mei-Fang,FANG Wei-zheng,HE Li.Tilted Angels of ZnTe and CdTe Epilayers Grown on Si(211) and GaAs(211)B Substrates by MBE[J].Journal of Synthetic Crystals,2005,34(4):649-652. |
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| Authors: | WANG Yuan-Zhang CHEN Lu WU Yan WU Jun YU Mei-Fang FANG Wei-zheng HE Li |
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| Institution: | WANG Yuan-zhang~ |
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| Abstract: | Measurements using X-ray double crystal diffraction(XDCD) were carried out to investigate the tilted angels of ZnTe and CdTe epilayers grown on 76mm Si(211) and GaAs(211)B substrates by molecular-beam epitaxy. The results show that the epilayer's tilts toward about the coincidence axis, independent of the substrates employed. Further more, a linear relationship of tilted angles and lattice mismatch between the epilayer and substrate was found. It was also confirmed that peak of the epilayer corresponds to 255], which is the first-order twin of about twist axis. |
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| Keywords: | MBE lattice mismatch tilted angel twin crystal |
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