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Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer |
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| Authors: | He Guotian Liao Changrong Yuangang Lu |
| Affiliation: | a Optical Engineering Key Laboratory, College of Physics and Information Technology, Chongqing Normal University, Chongqing 400047, China b Chongqing University, Chongqing 400030, China c Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China d Chongqing Technology and Business University, Chongqing 400067, China e Institute of Optical Communication Engineering, School of Engineering and Management, Nanjing University, Nanjing 210093, China |
| Abstract: | In this paper, we propose a sinusoidal phase modulating (SPM) interferometer that is insensitive to external disturbances, and its measuring principle is analyzed theoretically. In the SPM interferometer, the interference signal is detected by a high-speed image sensor based on a low-speed CCD and a signal processing circuit is used to obtain the phase of each point on the surface. Therefore, the surface profile can be measured real-time. The experiments measuring the surface profile of a wedge-shaped optical flat show that the measurement time of the SPM interferometer is less than 10 ms, the repetitive measurement accuracy is 4.2 nm. The results show that the impacts of nonlinear distortion of the piezoelectric transducer (PZT) and part external disturbance are removed. |
| Keywords: | Feedback control Real-time measurement Surface profile SPM interferometer |
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