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Molecular Dynamics Simulation of Copper Nanofilm Self-Assembly on Silicon Substrate under Gas-Discharge Plasma Conditions |
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| Authors: | Fairushin I I Shemakhin A Yu Khabir’yanova A A |
| Institution: | 1.Kazan (Volga Region) Federal University, 420008, Kazan, Russia ;2.Joint Institute for High Temperatures, 125412, Moscow, Russia ;3.Tupolev National Research Technical University of Kazan—KAI, 420111, Kazan, Russia ;4.Higher School of Economics (National Research University), 119048, Moscow, Russia ; |
| Abstract: | High Energy Chemistry - Using the molecular dynamics method, the sputtering of a copper target and the subsequent formation of a copper nanofilm on a silicon substrate has been modeled. The process... |
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