Growth of oriented Pb(ZrxTi1-x)O3 thin films on glass substrates by pulsed laser deposition |
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Authors: | P. Verardi M. Dinescu F. Craciun R. Dinu M.F. Ciobanu |
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Affiliation: | (1) Department of Mechanical Engineering, National University of Singapore, Singapore, 117576, Singapore; |
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Abstract: | Oriented crystalline Pb(ZrxTi1-x)O3 (x=0.53) (PZT) thin films were deposited on metallized glass substrates by pulsed laser deposition (1060-nm wavelength Nd:YAG laser light, 10-ns pulse duration, 10-Hz repetition rate, 0.35-J/pulse and 25-J/cm2 laser fluence), from a commercial target at substrate temperatures in the range 380-400 °C. Thin films of 1-3 7m were grown on Au(111)/ Pt/NiCr/glass substrates with a rate of about 1 Å/pulse on an area of 1 cm2. The deposited PZT films with perovskite structure were oriented along the (111) direction, as was revealed from X-ray diffraction spectra. Fourier transform infrared spectroscopy (FTIR) was performed on different PZT films so that their vibrational modes could be determined. Piezoelectric d33 coefficients up to 30 pC/N were obtained on as-deposited films. Ferroelectric hysteresis loops at 100 Hz revealed a remanent polarization of 20 7C/cm2 and a coercive field of 100 kV/cm. |
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