Thermal Analysis of Metalorganic Complexes of Copper for Evaluation as CVD Precursors

Metalorganic complexes of copper have been synthesized by modifying the ligand in the β-diketonate class of compounds. Detailed thermal analysis of several β-diketonate complexes of copper has been carried out to evaluate their suitability as precursors for chemical vapor deposition (CVD). A comparison of their relative volatilities has been made by determining their sublimation rates at different temperatures. Thermal analyses of these complexes reveal significant differences among their volatilities and decomposition patterns. This revised version was published online in August 2006 with corrections to the Cover Date.