| Abstract: | The objective of this paper is to provide a systematic test for fabrication or evaluation of a bilayer film structure between Cr and Al in micro/nanoelectronic manufacturing. The Cr/Al bilayer film is fabricated by using the magnetron sputtering. To understand the basic mechanical properties of the Cr/Al bilayer films, the elastic modulus and the hardness of the sample are investigated by using a nanoindenter test. The test can show the changing trend of the Cr/Al sample structure. To investigate the integrating characteristics of the sample in progress, the effect of the thermal cycling loading and no-thermal cycling loading on the integrating force of the Cr/Al samples is tested by using nanoscratch. The interfacial binding force in the films can be obtained for understanding the integrating characteristics. It builds a basis for future work on progress investigation of physical property of Cr/Al bilayer film structure. |
