Negative ion-containing plasma in parallel-plate radio-frequency discharge in oxygen

The properties of a plasma in a parallel-plate radio frequency (rf) symmetric discharge of 13.56 MHz in oxygen have been investigated. The plasma contains negative ions. The temperature and density of the negative ions have been determined from the slope and height of the semilog-plotted second derivative of the probe characteristics. The laser photodetachment technique is applied, and data indicating the existence of negative ions are obtained. The negative ion densities deduced by both methods are comparable. The negative ion temperature is found to be from 0.1 to 0.6 eV, depending on the pressure and rf power density. The electron energy distribution f(E) deviates from Maxwellian and has a depletion of low-energy parts, which may be due to the loss of low-energy electrons in attachments. A shifted annular-shaped distribution is fitted to the measured f(E), and the data analysis is made according to this form of f(E).