First principles study of Si etching by CHF3 plasma source |
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Authors: | Weichao WangSang ho Lee Gyoodong KimMoon J Kim Kyeongjae Cho |
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Institution: | a Department of Materials Science & Engineering, The University of Texas at Dallas, Richardson, TX 75080, United States b Department of Physics, The University of Texas at Dallas, Richardson, TX 75080, United States c School of Advanced Materials Engineering, Kookmin University, Seoul 136-702, South Korea d New Power Plasma Co. LTD, Suwon-Si, Gyeonggi-do 443-390, South Korea |
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Abstract: | A model of CF3 etching Si (2 × 4) surface has been developed based on density functional theory. We find that the reconstruction Si surface tends to be fully F-terminated. Meanwhile, C-C chain forms spontaneously on the top of the surface to resist further F-Si interacting. Over-saturated Si bonds could still be stable as well due to the strong F-Si bonding, however, it needs to overcome an energy barrier of 1.85 eV to achieve this doubly saturated bonding. Two reaction paths are found to investigate chemical reaction of CF3 with the full F-terminated Si surface. The first path displays that all fully saturated F-Si bonds could be over-saturated and thus produce F-Si-F bonds with an energy barrier of ∼1.85 eV. For this path, there is no product of SiF4; the second path indicates a formation of SiF4 with a much lower surface energy than the first path. The formation of SiF4 shows the possible etching mechanism. |
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Keywords: | Etching rate Si surface etching Density functional theory Nudge-elastic-band (NEB) |
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