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Hydrogen-free spray pyrolysis chemical vapor deposition method for the carbon nanotube growth: Parametric studies
Authors:Mihnea Ioan IonescuYong Zhang  Ruying LiXueliang Sun  Hakima Abou-RachidLouis-Simon Lussier
Institution:a Department of Mechanical and Materials Engineering, University of Western Ontario, London, ON. N6A 5B9, Canada
b Defense Research & Development Canada - Valcartier, 2459 Boulevard Pie-XI Nord, Québec, QC. G3J 1X5, Canada
Abstract:Spray pyrolysis chemical vapor deposition (CVD) in the absence of hydrogen at low carrier gas flow rates has been used for the growth of carbon nanotubes (CNTs). A parametric study of the carbon nanotube growth has been conducted by optimizing various parameters such as temperature, injection speed, precursor volume, and catalyst concentration. Experimental observations and characterizations reveal that the growth rate, size and quality of the carbon nanotubes are significantly dependent on the reaction parameters. Scanning electron microscopy, transmission electron microscopy, and Raman spectroscopy techniques were employed to characterize the morphology, structure and crystallinity of the carbon nanotubes. The synthesis process can be applied to both semiconducting silicon wafer and conducting substrates such as carbon microfibers and stainless steel plates. This approach promises great potential in building various nanodevices with different electron conducting requirements. In addition, the absence of hydrogen as a carrier gas and the relatively low synthesis temperature (typically 750 °C) qualify the spray pyrolysis CVD method as a safe and easy way to scale up the CNT growth, which is applicable in industrial production.
Keywords:Carbon nanotubes  Chemical vapor deposition  Spray pyrolysis
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