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Investigation of crystal structure and new ellipsometric properties of hexagonal CdS epilayers
Authors:DJ Kim  YD Choi
Institution:a Institute of Science and Technology, Mokwon University, Daejeon 302-729, Republic of Korea
b Department of Microbial & Nano materials, Mokwon University, Daejeon 302-729, Republic of Korea
c Department of Materials Engineering, Hanbat National University, Daejeon 305-719, Republic of Korea
d Division of Microelectronics & Display Technology, Wonkwang University, Iksan 570-749, Republic of Korea
Abstract:High quality hexagonal CdS epilayer was grown on GaAs (1 1 1) substrates by the hot-wall epitaxy method. The crystal structure of the grown CdS epilayers was confirmed to be the hexagonal structure by X-ray diffraction pattern and scanning electron microscopy image. The optical properties of the hexagonal CdS epilayers were investigated in a wide photon energy range between 2.0 and 8.5 eV using spectroscopic ellipsometry (SE) at room temperature. The data obtained by SE were analyzed to find the critical points of the pseudodielectric function spectra, 〈?(E)〉 = 〈?1(E)〉 + i?2(E)〉, such as E0, E1A, E1B, E0, F1, and two E2 structures. In addition, the second derivative spectra, d2?(E)/dE2, of the pseudodielectric function of hexagonal CdS epilayers were numerically calculated to determine the critical structures. Four structures, such as E0F1, and two E2 structures, from 6.0 eV to 8.0 eV were observed, for the first time, at 300 K by ellipsometric measurements for the hexagonal CdS epilayers.
Keywords:Hexagonal-CdS  Spectroscopic ellipsometry  Hot-wall epitaxy  SEM image  Pseudodielectric function
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