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Influence of the grain boundary barrier height on the electrical properties of Gallium doped ZnO thin films |
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| Authors: | Chang-Feng Yu Sy-Hann ChenShih-Jye Sun Hsiung Chou |
| Institution: | a Department of Electrophysics, National Chiayi University, Chiayi 60004, Taiwan b Department of Applied Physics, National University of Kaohsiung, Kaohsiung 811, Taiwan c Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung 804, Taiwan |
| Abstract: | The pulsed laser deposition (PLD) technique is used to deposit Gallium doped zinc oxide (GZO) thin films on glass substrates at 250 with different Gallium (Ga) doping concentration of 0, 1.0, 3.0 and 5.0%. The influence of Ga doping concentration on structure, chemical atomic compositions, electrical and optical properties was investigated by XRD, XPS, Hall measurement and UV spectrophotometer, respectively. The relationship between electrical properties and Ga doping concentration was clarified by analyzing the chemical element compositions and the chemical states on the GZO films. It is found that the carrier concentrations and oxygen vacancies in the GZO films increase with increasing Ga doping concentration. The lowest resistivity (3.63 × 10−4 Ω cm) and barrier height of grain boundaries (14 mV) were obtained with 3% Ga doping. In particular, we suppose the band gap of 5% Ga doping sample larger than that of 3% Ga doping sample is due to the quantum size effect from the amorphous structure rather than Moss-Burstein shift. |
| Keywords: | Pulsed laser deposition Gallium doped zinc oxide Quantum size effect Barrier height |
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