Design,development and reliability testing of a low power bridge-type micromachined hotplate |
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| Institution: | 1. University of Veracruz, Xalapa, Veracruz, Mexico;2. Dept. of Electronic Engineering, National Institute for Astrophysics, Optics and Electronics-INAOE, Puebla, Mexico;1. Department of Physics, University of Azad Jammu & Kashmir, 13100 Muzaffarabad, Pakistan;2. Thin Films and Physics of Nanostructures, Department of Physics, Bielefeld University, P.O. Box 100131, 33501 Bielefeld, Germany;1. Dept. of Electronics Engineering, Chang Gung University, Taoyuan, Taiwan, ROC;2. Dept. of Electrical Engineering, National Central University, Jhongli, Taiwan, ROC |
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| Abstract: | In this paper, the development and reliability of a platinum-based microheater with low power consumption are demonstrated. The microheater is fabricated on a thin SiO2 bridge-type suspended membrane supported by four arms. The structure consists of a 0.6 μm-thick SiO2 membrane of size 50 μm × 50 μm over which a platinum resistor is laid out. The simulation of the structure was carried out using MEMS-CAD Tool COVENTORWARE. The platinum resistor of 31.0 Ω is fabricated on SiO2 membrane using lift-off technique. The bulk micromachining technique is used to create the suspended SiO2 membrane. The temperature coefficient of resistance (TCR) of platinum used for temperature estimation of the hotplate is measured and found to be 2.2 × 10?3/°C. The test results indicate that the microhotplate consumes only 11.8 mW when heated up to 400 °C. For reliability testing, the hotplate is continuously operated at higher temperatures. It was found that at 404 °C, 508 °C and 595 °C, the microhotplate continuously operated up to 16.5 h, 4.3 h and 4 min respectively without degrading its performance. It can sustain at least 53 cycles pulse-mode of operation at 540 °C with ultra-low resistance and temperature drifts. The structure has maximum current capability of 19.06 mA and it can also sustain the ultrasonic vibration at least for 30 min without any damage. |
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| Keywords: | Low power consumption Microhotplate Pt Reliability |
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