Effect of electric field polarity on inter-poly dielectric during cell operation for the retention characteristics |
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| Affiliation: | 1. School of Electrical and Electronic Engineering, Yonsei University, Seoul, Republic of Korea;2. Research and Development Division, SK Hynix Semiconductor Inc., Incheon, Republic of Korea;1. Satellite & Wireless Convergence Research Department, Electronics and Telecommunications, 218 Gajeong-ro, Yuseong-gu, Daejeon 305-700, Republic of Korea;2. Ace Technology, 237, Namdongseo-ro, Namdong-gu, Incheon 405-849, Republic of Korea;1. School of Reliability and Systems Engineering, Beihang University, Beijing 100191, China;2. Avic Aviation Motor Control System Institute, Wuxi 214000, China;3. Center for Advanced Life Cycle Engineering (CALCE), University of Maryland, USA;1. Swerea IVF AB, Argongatan 30, SE-43153 Mölndal, Sweden;2. Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Kemivägen 9, Se 412 96 Göteborg, Sweden;3. Eberspächer Exhaust Technology GmbH & Co. KG, Heinrich-Hertz-Straße 10, 59423 Unna, Germany;1. Institute of Electronics Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan;2. Department of Electrical Engineering, National Chi Nan University, Nantou 54561, Taiwan;3. National Nano Device Laboratories, Hsinchu 30078, Taiwan |
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| Abstract: | Retention characteristic represents a capability to maintain the storage data and it is related with the reliability of memory device. The retention characteristic is degraded by the leakage of charges from a floating gate to a control gate, and thus the leakage current at low and moderate electric field of inter-poly dielectric (IPD) is one of the important characteristic for floating gate type flash memories. In addition, it is necessary to investigate the effects of the electric field polarity on the electric characteristics of IPD because the electric field polarity is changed as the cell operations such as the programming and erasing. Therefore, in this paper, the variation of the leakage current of IPD at moderate electric field region is measured with varying the previously applied electric field polarity. Based on the result, the effect of sequential change of an applied electric field polarity on the electrical characteristics is analyzed. |
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| Keywords: | Inter-poly dielectric (IPD) ONO Leakage current Bias polarity |
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