Fizeau型偏振移相干涉仪的实验研究

研究了一种Fizeau型偏振移相干涉仪。以中心波长为650nm的多纵模半导体激光器作为光源,利用光源的短相干特性和一套偏振延迟装置分出一对偏振方向正交的参考光和测试光,采用巴比涅-索列尔补偿器作为偏振移相器。测试了一块平行平板的前表面面形,面形PV值为0.0682λ,RMS值为0.0127λ。该方法的优点是移相精度高,移相时无须推动参考镜,适用于大口径光学系统的干涉测试,可消除多表面干涉杂散条纹的影响。

Experimental research on low-coherence polarization phase-shifting Fizeau interferometer

A polarization phase-shifting Fizeau interferometer is discussed. A multimode semiconductor laser is used as the light source,of which coherence is used to effectively separate out the orthogonally polarized test and reference beam components for interference. The phase shifting interferometry has been applied using Babinet-Soleil Compensator. By using the 4-bucket algorithm, front surface figure of a transparent plate has been tested. Measurement results show that the PV and RMS error are 0.068λ and 0.013λ respectively. Advantages of the technique presented are high accuracy and linearity in phase stepping, no perturbation of interference cavity during the phase shifting and possibility of large-aperture optical testing,and eliminating the influence of spurious interference fringe caused by multiple-reflection.