| 微光学元件复制技术研究 |
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| 引用本文： | 邓启凌,杜春雷.微光学元件复制技术研究[J].光子学报,2002,31(1):110-113. |
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| 作者姓名： | 邓启凌 杜春雷 |
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| 作者单位： | 中国科学院光电技术研究所微细加工光学技术国家重点实验室,成都,610209 |
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| 摘 要： | 本文介绍了一种用硅橡胶做模具、光照固化光敏胶的微光学元件复制技术.利用这种方法成功地复制了各种单元尺寸的微光学元件.获得复制精度高、表面粗糙度低、光学性能良好的元件.并可批量生产,降低生产成本.
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| 关 键 词： | 复制 微光学元件 微透镜阵列 |
| 收稿时间： | 2001/5/14 |
| 修稿时间： | 2001年5月14日 |
THE RESEARCH ON REPLICATION OF MICRO-OPTICAL ELEMENTS |
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| Deng Qiling,Du Chunlei State Key Lab of Optical Technologies for Microfabrication.THE RESEARCH ON REPLICATION OF MICRO-OPTICAL ELEMENTS[J].Acta Photonica Sinica,2002,31(1):110-113. |
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| Authors: | Deng Qiling Du Chunlei State Key Lab of Optical Technologies for Microfabrication |
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| Institution: | Deng Qiling,Du Chunlei State Key Lab of Optical Technologies for Microfabrication,Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209 |
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| Abstract: | In this paper,a technique for the replication of micro-optical elements is presented.Silicone rubber is used as mold and UV-curing adhesive is used to make the repilcated copy.It is useable for different sizes of the microlens (aperture from 17μm to 2mm,depth from several hundred nm to several hundred μm).The replicated elements have a high fidelity and a low coarseness.It also can be producted in batch,and reduce the cost. |
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| Keywords: | Replication Micro-optical elements Micro-lenses arrays |
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