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Study of temperature distribution in high-temperature furnaces for silicon carbide monocrystal and epitaxial layer growing
Authors:S. K. Lilov  Yu. M. Tairov  V. F. Tsvetkov
Abstract:A method to determine temperature gradient and distribution in high-temperature furnaces for silicon carbide monocrystal and epitaxial layer growing is suggested on the basis of the results obtained from the experiments on silicon carbide epitaxial layer growing kinetics in gas using 2 „sandwiches”︁.
Keywords:
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