Zur Errechnung der Intensitäten von Auger-Übergängen für die quantitative Analyse von Festkörperoberflächen mit der Augerelektronenspektroskopie (AES)

According to an empirical equation for the Auger electron intensity arising from primary electron bombardment of solid surfaces, the parameters such as ionization cross section, relative Auger transition probability, backscattering factor and mean escape depth were evaluated for the L₃M₄₅M₄₅ Auger transition of elements with atomic number Z = 22 to 33. A comparison of the calculated relative intensities with experimental values from Palmberg et al. indicates a good agreement of both curves representing the intensity in dependence of atomic number. The mean relative deviation of calculated intensities from measured ones amounts to 20%. This is nearly the same value, as it has been estimated so far for the accuracy of quantitative AES without standard. Examining the influence of individual intensity parameters we were able to show that above all the ionization cross section and in the present case also the relative Auger transition probability determine the value of intensity.