薄膜-基体型磁致伸缩微致动器的数值模拟

磁致伸缩薄膜是一种性能优异的微驱动元件。本文针对磁致伸缩薄膜一基体结构中薄膜磁致伸缩系数与层合结构变形之间关系的问题，从经典层合板理论的角度导出了其基本方程，并在此基础上对基体远厚于薄膜的情形采用非层合板理论进行了简化。通过比较非层合板理论和层合板理论下的薄膜一基体结构变形的有限元结果，讨论了有关几何参数和物理参数的影响，给出了用非层合板理论近似处理薄膜一基体型磁致伸缩微致动器的适用条件。

Numerical Simulation of Magnetostrictive Film-Substrate Microactuators

Magnetostrictive films are excellent microactuator components. Based on the classical theory of laminated plates, a set of equations for the relation between the magnetostriction constant of the magnetostrictive film and the deflection of the composite structure is derived in this paper. And then the equations are reduced by means of the theory of monolayer plates when the substrate is much thicker than the film. Through comparing the discrepancy of FEM's results by the two theories under the condition of different geometric and physical parameters, applicability of the reduced equations which are approximately used to deal with magnetostrictive film-substrate microactuators is discussed.