溶液法铝诱导晶化制备多晶硅薄膜

采用铝（Al）盐溶液作为诱导源进行了非晶硅晶化成多晶硅的研究.光学显微镜观测与Raman光谱分析表明，合适配比的铝盐溶液能够将非晶硅予以诱导晶化.采用剥层XPS测试分析，探究了Al盐溶液与硅表面可能的化学反应以及随之发生的硅-铝层交换的过程.最后对溶液法诱导晶化的机理进行了讨论.关键词：铝诱导晶化多晶硅薄膜溶液法

Preparation of poly-slicon thin film by aluminum induced crystallization based on Al-salt solution

A new method to prepare polycrystalline silicon thin film from a-Si thin films using aluminate solution as induced source was introduced in this article. According to the analysis using optical microscope and Raman spectrum, it was indicated that the a-Si thin film could successfully be crystallized in certain Al-salt solutions. Using the X-ray photoelectron spectroscopy explored by shelling the samples into several sub-layers, the possible chemical reaction between the surface of silicon and aluminate solution was found and the continuous layer exchange process was confirmed. In the end, the mechanism of solution-based aluminum-induced crystallization was discussed.