A.F. Ioffe Physical Technical Institute, Academy of Sciences of the USSR, Leningrad 194021, USSR
Abstract:
The peculiarities of InGaAsP ultra-thin layer LPE deposition onto a moving substrate are discussed. The abnormal dependency of the layer thickness on the growth melt supersaturation was found at sliding velocity higher than 0.1 m/s. The growth cell shape was shown to be the main factor affecting the thickness of the deposited layer at growth times shorter than 10 ms. The melt motion influence on the LPE deposition process at high sliding velocities is discussed.