A method for determining foil thicknesses in TEM by using convergent beam electron diffraction under weak beam conditions |
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Authors: | K. Z. Botros |
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Affiliation: | Fuel Channel Components Branch, Reactor Materials Division, Atomic Energy of Canada Ltd, Chalk River Laboratories, Station 55, Chalk River, Ontario, Canada K0J 1J0 |
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Abstract: | In the present work, convergent beam electron diffraction was studied in zirconium (a material of intermediate atomic number) at 300 keV, under weak beam diffraction conditions. For a particular thickness, the details in an observed low order disc were matched to those calculated using the multibeam dynamical theory. This presents the possibility of determining foil thickness over a wide range, with an estimated experimental accuracy of ≈7% or less. In contrast to other convergent beam techniques, the present method, which uses weak beam conditions, can employ commonly-occurring low order reflections to extract thicknesses. A simple equation based on the two beam approximation, is derived to determine foil thickness (to within ≈ 10%) without resorting to detailed image matching. This equation can be used for a rough estimate of foil thickness while carrying out TEM observations. |
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Keywords: | foil thickness determination convergent beam electron diffraction weak beam conditions |
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