Characterization of the Active Species in the Afterglow of a Nitrogen and Helium Atmospheric-Pressure Plasma

The concentrations of the neutral active species in the afterglow of a nitrogen and helium atmospheric-pressure plasma have been determined by optical emission and absorption spectroscopy and by numerical modeling. For operation with 10 Torr N₂ and 750 Torr He, at 15.5 W/cm³ rf power, 30.4 L/min flow rate, and a neutral temperature of 50°C, the plasma produced 4.8×10¹⁵ cm^–3 of ground state nitrogen atoms, N(⁴S), 2.1×10¹³ cm^–3 of N₂(A³_u), 1.2×10¹² cm^–3 of N₂(B³_g), and 3.2×10⁹ cm^–3 of N₂(C³_u). The concentration of nitrogen atoms and metastable state nitrogen molecules, N₂(A), increased gradually with the rf power and the nitrogen partial pressure. Both the model and experiments indicate that ground-state nitrogen atoms are the dominant active species in the afterglow beyond 2.0 ms.