| 硅基二维平板光子晶体高Q微腔的制作和光谱测量 |
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| 引用本文： | 周长柱,王晨,李志远.硅基二维平板光子晶体高Q微腔的制作和光谱测量[J].物理学报,2012,61(1):14214-014214. |
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| 作者姓名： | 周长柱 王晨 李志远 |
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| 作者单位： | 中国科学院物理研究所光物理重点实验室, 北京 100190 |
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| 基金项目： | 国家自然科学基金 (批准号: 10525419)和国家重点基础研究发展计划(973计划)(2011CB922002)资助的课题. |
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| 摘 要： | 利用微加工技术, 在SOI上制作出了高Q值的光子晶体微腔, Q值可以达7×104以上, 为后续的光与物质相互作用和量子信息方面的实验奠定了基础. 实验结果与理论模拟符合得较好. 通过三维时域有限差分法模拟, 得到光子晶体微腔的Q值为1.2×105左右.
关键词：
光子晶体
微腔
微加工
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| 关 键 词： | 光子晶体 微腔 微加工 |
| 收稿时间： | 1/7/2011 12:00:00 AM |
Fabrication and spectra-measurement of high Q photonic crystal cavity on silicon slabs |
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| Zhou Chang-Zhu,Wang Chen and Li Zhi-Yuan.Fabrication and spectra-measurement of high Q photonic crystal cavity on silicon slabs[J].Acta Physica Sinica,2012,61(1):14214-014214. |
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| Authors: | Zhou Chang-Zhu Wang Chen and Li Zhi-Yuan |
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| Institution: | Laboratory of Optical Physics, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China;Laboratory of Optical Physics, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China;Laboratory of Optical Physics, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China |
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| Abstract: | We fabricate a high Q photonic crystal cavity on the top of SOI (silicon on insulator) with EBL (electron beam lithography) and ICP (inductively coupled plasma). The value of Q can reach 7× 104. It provides basic condition for the following experiments, for example for the study of interaction between light and substance. The high Q cavity also provides good circumstance for the quantum information. The theoretical result of the value of Q is 1.2× 105 from FDTD (finite difference time domain) simulation. |
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| Keywords: | photonic crystal cavity micro-fabrication |
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