| X-ray diffraction study of effect of deposition conditions on α--β phase transition and stress evolution in sputter-deposited W coatings |
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| 引用本文： | 王聪,BraultPascal,PineauAlain,PlantinPascale,ThomannAnne-Lise.X-ray diffraction study of effect of deposition conditions on α--β phase transition and stress evolution in sputter-deposited W coatings[J].中国物理 B,2006,15(2):432-436. |
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| 作者姓名： | 王聪 BraultPascal PineauAlain PlantinPascale ThomannAnne-Lise |
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| 作者单位： | Groupie de Recherches sur l'Energé tique des Milieux Ionisés UMR 6606 -CNRS, Ecole Polytechnique de l'Universitéd'Orléans, BP6744 Université d'Orléans, F-45067 Orléans, Cedex 2, France;School of Science, Beijing University of Astronautics and Aeronautics, Beijing 100083, China;Groupie de Recherches sur l'Energé tique des Milieux Ionisés UMR 6606 -CNRS, Ecole Polytechnique de l'Universitéd'Orléans, BP6744 Université d'Orléans, F-45067 Orléans, Cedex 2, France;Groupie de Recherches sur l'Energé tique des Milieux Ionisés UMR 6606 -CNRS, Ecole Polytechnique de l'Universitéd'Orléans, BP6744 Université d'Orléans, F-45067 Orléans, Cedex 2, France;Groupie de Recherches sur l'Energé tique des Milieux Ionisés UMR 6606 -CNRS, Ecole Polytechnique de l'Universitéd'Orléans, BP6744 Université d'Orléans, F-45067 Orléans, Cedex 2, France;Groupie de Recherches sur l'Energé tique des Milieux Ionisés UMR 6606 -CNRS, Ecole Polytechnique de l'Universitéd'Orléans, BP6744 Université d'Orléans, F-45067 Orléans, Cedex 2, France |
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| 基金项目： | Acknowledgement C. Wang would like to thank Région Centre for a research fellowship. CME - Université d＇0rléans is acknowledged for the SEM measurements. CRT Plasma Laser is acknowledged for partial funding. Thanks to A. Richard （CME, University of 0rleans） for help in SEM measurements. |
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| 摘 要： | Pure W and W-Cu-W trilayer coatings were deposited on an Fe substrate by d.c. magnetron sputtering. The α-β phase evolution, intragranular stress evolution in sputter-deposited W layer were investigated by x-ray diffraction. They are directly related to the film microstructure, density and adhesion. Therefore, control of the film stress and phase component transition is essential for its applications. The phase component transition from β-W to α-W and intragranular stress evolution from tensile to compressive strongly depend on the deposition parameters and can be induced by lowering Ar pressure and rising target power. The compressively stressed films with α-W phase have a dense microstructure and high adhesion to Fe substrate.
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| 关 键 词： | X射线衍射 沉积态效应 α-β相跃迁 薄膜应力 |
| 收稿时间： | 2005-05-26 |
| 修稿时间： | 2005-05-262005-11-07 |
X-ray diffraction study of effect of deposition conditions on α--β phase transition and stress evolution in sputter-deposited W coatings |
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| Wang Cong,Pascal Brault,Alain Pineau,Pascale Plantin and Anne-Lise Thomann.X-ray diffraction study of effect of deposition conditions on α--β phase transition and stress evolution in sputter-deposited W coatings[J].Chinese Physics B,2006,15(2):432-436. |
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| Authors: | Wang Cong Pascal Brault Alain Pineau Pascale Plantin and Anne-Lise Thomann |
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| Institution: | Groupie de Recherches sur l'Energé tique des Milieux Ionisés UMR 6606 -CNRS, Ecole Polytechnique de l'Universitéd'Orléans, BP6744 Université d'Orléans, F-45067 Orléans, Cedex 2, France; Groupie de Recherches sur l'Energé tique des Milieux Ionisés UMR 6606 -CNRS, Ecole Polytechnique de l'Universitéd'Orléans, BP6744 Université d'Orléans, F-45067 Orléans, Cedex 2, France;School of Science, Beijing University of Astronautics and Aeronautics, Beijing 100083, China |
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| Abstract: | Pure W and W--Cu--W trilayer coatings were deposited on an Fe substrate by
d.c. magnetron sputtering. The $\alpha -\beta$ phase evolution,
intragranular stress evolution in sputter-deposited W layer were
investigated by x-ray diffraction. They are directly related to the film
microstructure, density and adhesion. Therefore, control of the film stress
and phase component transition is essential for its applications. The phase
component transition from $\beta$-W to $\alpha $-W and intragranular stress
evolution from tensile to compressive strongly depend on the deposition
parameters and can be induced by lowering Ar pressure and rising target
power. The compressively stressed films with $\alpha $-W phase have a dense
microstructure and high adhesion to Fe substrate. |
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| Keywords: | W coatings x-ray diffraction $\alpha$--$\beta$ phase
component transition thin film stress |
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