基于RCWA的太阳能电池抗反射膜分析研究

利用严格耦合波分析法（RCWA）分别计算了五种不同形貌的亚波长浮雕结构的太阳能电池抗反射膜性能，分别从占空比、光栅高度和周期等结构参数以及入射光角度进行模拟。研究结果表明：周期为200rim，高度为400nm，占空比为1的金字塔型浮雕结构的抗反射效果令人满意，且平均反射率低于1％；光波的入射角对光栅的反射率影响较大，光波在光栅法线的角度控制在40°以下合适。通过对亚波长浮雕结构的反射特性模拟和分析，为太阳能电池抗反射膜设计与制作提供理论支持。

Analysis and Research on Anti-Refection Structures of Solar Cells Based on RCWA

The rigorous coupled-wave analysis（RCWA） is used to calculate the performance of five different sub-wavelength anti-reflection relief structures in the solar cells. Simulation analysis is designed using the structural parameters such as the period, duty cycle, grating height, and the angle of incident light. The results show that the anti-reflection of the pyramid relief structure is satisfactory, with the period of 200 nm, height of 400 nm and duty ratio of 1. The average reflectivity is less than 10% using this structure. Additionally, the reflectivity of the grating is influenced by the incidence angle of the light. It is suited to control the light wave in the angle of less than 40 degrees off the grating normal direction. It provides theoretical support for the design and production of the anti-reflection structures of solar cells through simulation and analy- sis of the reflective properties of the sub-wavelength relief structures.