光学平移装置行进横向漂移的干涉法测量

应用泰曼-格林干涉仪测量步进电机控制下光学平移装置行进时的横向漂移，鉴于步进装置行进时的震动和它引起的探头抖动干扰，提出一种基于小波变换滤波的条纹细分技术，以利于信号识别和精确测量．

The measurement of the transversal shift of an optic-moving stage with interferometer

While controlling by a stepping-motor driver, the optic-moving stage is shifting along its axis and the transversal variation can be measured using a Twyman-Green interferometer, owing to the vibration of the apparatus on moving that yields disturbance to the detector, a technique to phase-step division of fringes based on wavelet transform filtering is used here to facilitate signal recognition and precise measurement.