Absolute measurement of sputtered ion fractions using matrix isolation spectroscopy |
| |
Authors: | Ch Steinbrüchel DM Gruen |
| |
Institution: | Chemistry Division, Argonne National Laboratory, Argonne, Illinois 60439, USA |
| |
Abstract: | Sputtering yields for neutrals and ions have been measured by collecting the sputtered species in a noble gas matrix and determining their amounts from optical absorption spectroscopy. The atomic ion fractions for Ti and Zr bombarded by O2+ at 2 keV are 0.8 and 0.4, respectively, whereas TiO and ZrO are sputtered largely as neutrals. Neutral sputtering yields from Ar+ bombardment arc consistent with previous measurements. The experimental results are compared with various theoretical models for the sputtering process. |
| |
Keywords: | |
本文献已被 ScienceDirect 等数据库收录! |
|