Performance of a combined magnetron pump-gauge at ultrahigh vacuum |
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| Authors: | J.P. Hobson |
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| Affiliation: | Division of Electrical Engineering, National Research Council of Canada, Ottawa, Canada K1A 0R8 |
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| Abstract: | This paper reports experimental results on 3 magnetron pump-gauges designed to combine the properties of UHV magnetron pumps and magnetron gauges into a single device with a portable (battery operated) power supply. The pump-gauges had a renewable cathode of Ti and were useful in the pressure range 7 × 10?9 to 1.5 × 10?4 Pa. As gauges, the sensitivities were about 1.5 × 10?2 A Pa?1. As pumps, the speeds were about 0.15 litre s?1 for Kr. |
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