干涉测量用半导体激光器驱动电源

设计了一种可调制的高稳定度半导体激光器驱动电路。该电路的直流稳定度高达1.5×10-5，输出电流在0～200mA内连续可调，长时间工作（12h以上）电流变化小于1μA；在直流基础上注入100kHz～300kHz的调制电流，其调制深度为0～100mA连续可调，可实现在激光干涉测量中对光波频率和光波强度的调制。将该电路驱动的光栅外腔半导体激光器和辅助温度控制电路应用于光干涉测量技术中，得到了功率稳定、波长单一的激光输出，解决了激光器的跳模现象，完成了对远距离微小振动（纳米量级）的测量。

Driver circuit of semiconductor laser for interferometry

The design of a driver circuit for high-stability semiconductor laser is introduced. Its output current can be continuously adjusted from zero to two hundred milliamperes and its stability reaches 1.5×10-5. The variation of the output current is less than 1μA when its operation time is longer than 12 h. The modulation of frequency and intensity of optical wave in the laser interferometry can be achieved by the modulated current (100 kHz～300 kHz) input,whose modulation depth is continuously adjustable from zero to one hundred milliampere. By applying the grating external cavity semiconductor laser and the auxiliary temperature-control current driven by the driver current to the interferometry,the laser output with stable power and single wavelength was obtained to eliminate the mode hopping phenomenon of lasers and to realize the long-distance measurement for small vibration.