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Thermoelastic damping in flexural vibration of bilayered microbeams with circular cross-section
Institution:1. College of Electronic and Optical Engineering & College of Microelectronic, Nanjing University of Posts and Telecommunications, Nanjing 210003, China;2. National and local Joint Engineering Laboratory of RF Integration and Micro-Assembly Technology, Nanjing University of Posts and Telecommunications, Nanjing 210003, China;3. School of Mechanical Engineering, Southeast University, Nanjing 211189, China;1. State Key Laboratory of Robotics, Chinese Academy of Sciences, Shenyang Institute of Automation, Institutes for Robotics and Intelligent Manufacturing, Shenyang 110200, PR China;2. Department of Mechanical Engineering, Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong;3. Dalian University of Technology, Dalian, PR China;1. Institute for Infrastructure and Environment, Heriot-Watt University, Edinburgh EH14 4AS, UK;2. Department of Engineering, Durham University, Durham DH1 3LE, UK;3. Laboratory of Modelling and Combinatorial, FP Safi, Cadi Ayyad University, Morocco;1. School of Science, University of New South Wales, Canberra, Australia;2. I.E. Tamm Theory Department, P.N. Lebedev Physical Institute of the Russian Academy Sciences, 53 Leninsky Prospect, 119991 Moscow, Russia;1. Key Laboratory of Disaster Prevention and Mitigation in Civil Engineering of Gansu Province, Lanzhou University of Technology, Lanzhou 730050, China;2. School of Science, Lanzhou University of Technology, Lanzhou 730050, China;3. School of civil and transportation engineering, Qinghai Minzu University, Xining 810007, China;1. School of Automotive and Traffic Engineering, Jiangsu University, Zhenjiang 212013, China;2. School of Mechanical Engineering, Southeast University, Nanjing 211189, China;3. School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211, China;4. College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210003, China
Abstract:Predicting of thermoelastic damping (TED) is crucial in the design of micro-resonators with composite structures. Several analytical models were developed to evaluate TED in bilayered and three-layered microbeams in the past. However, the previous models focus on the microbeams with rectangular cross-section. This paper aims to study the TED in a bilayered microbeam with circular cross-section. The temperature field is approximated by using sine series and Bessel series in the circular cross-section. An analytical full model for TED in flexural vibration of bilayered microbeam is presented in the form of an infinite series. A simple model is also developed by retaining only the first term. The simulation results of the present model have a good agreement with those of the finite element method (FEM). The results indicate that well-resolved two peaks of TED are typically observed in the bilayered microbeams in which the value of k2/C2 is much less or higher than that of k1/C1. The present model is not a rapidly converging infinite series for most of the bilayered microbeams. The present model is more suitable for the long slender beams.
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