Non-equilibrium point defect phenomena influencing beryllium and zinc diffusion in GaAs and related compounds

Beryllium and zinc are the main p-type dopants used for the fabrication of devices based on GaAs or related III-V materials. Both elements are substitutionally dissolved on the group III sublattice and diffuse via the kick-out mechanism which involves group III self-interstitials. Non-equilibrium concentrations of these self-interstitials have a strong influence on the diffusivities of Be and Zn with often drastic consequences on device behavior especially if Be or Zn is used to realize narrow base regions in heterojunction bipolar transistors (HBTs). Various situations in which non-equilibrium point defects play a role for Be and Zn diffusion are discussed such as: in-diffusion of these dopants from an outside source, diffusion of grown-in dopants, self-interstitial generation by Fermi level surface pinning of highly n⁺-doped emitter cap or subcollector layers in HBTs, or recom bination-enhanced beryllium diffusion during device operation. Finally, we will comment on the diffusion behavior of carbon, which is dissolved on the group V sublattice in GaAs, is much less sensitive to non-equilibrium point defect, and, therefore, is increasingly used to replace Be and Zn as p-type dopants.On sabbatical leave from Duke University, School of Engineering, Durham, NC 27706, USA