Emission of charged clusters during metal sputtering by ions

A method for simulating processes of metal sputtering by ion bombardment in the form of large neutral and charged clusters with a number of atoms N≥5 based on simple physical assumptions and in fair agreement with experiment is suggested. As an example, the ionization degrees and ionization coefficients, as well as the relative cluster yields, are calculated as a function of the number of atoms in clusters of different metals (Ag, Nb, and Ta) bombarded by singly charged Ar⁺¹ and Au⁻¹ ions. A fluctuation mechanism of charge state formation for large clusters, which describes the dependence of the charge state distributions on cluster size and target temperature, is developed.