Optimization of growth parameters for MOVPE-grown GaSb and Ga1−xInxSb

The triethylgallium/trimethylantimony (TEGa/TMSb) precursor combination was used for the metal-organic vapour phase epitaxial growth of GaSb at a growth temperature of 520 °C at atmospheric pressure. Trimethylindium was added in the case of Ga_1−xIn_xSb growth. The effects of group V flux to group III flux ratio (V/III ratio) on the crystallinity and optical properties of GaSb layers are reported. It has been observed from the crystalline quality and optical properties that nominal V/III ratios of values greater than unity are required for GaSb epitaxial layers grown at this temperature. It has also been shown that Ga_1−xIn_xSb can be grown using TEGa as a source of gallium species at atmospheric pressure. The relationship between Ga_1−xIn_xSb vapour composition and solid composition has been studied at a V/III ratio of 0.78.