|
|||||
|
|
The etching of a-plane GaN epilayers grown metal-organic chemical vapour deposition |
|
| Authors: | Xu Sheng-Rui Hao Yue Zhang Jin-Cheng Zhou Xiao-Wei Cao Yan-Rong Ou Xin-Xiu Mao Wei Du Da-Chao Wang Hao |
| Institution: | [1]School of Microelectronics, Xidian University, Xi'an 710071, China and National Key Laboratory of Fundamental Science on Wide Band-Gap Semiconductor Technology, Xidian University, Xi'an 710071, China; [2]School of Electronical & Mechanical Engineering, Xidian University, Xi'an 710071, China |
| Abstract: | crystal morphology, stacking fault, nonpolar GaN, chemical etching |
| Keywords: | crystal morphology stacking fault nonpolar GaN chemical etching |
| 本文献已被 维普 等数据库收录！ | |