Investigation of surface reactions by the static method of secondary ion mass spectrometry: V. The oxidation of titanium,nickel, and copper in the monolayer range

By means of the static method of secondary ion mass spectrometry the oxidation of a polycrystalline titanium, nickel, and copper surface cleaned by ion bombardment, was investigated in the oxygen dose range up to 1200 L at room temperature. On titanium and nickel two different oxide phases were found, one covering the other. The thickness of the oxide layer on copper did not exceed one monolayer.