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Effects of the sputtering power on the crystalline structure and optical properties of the silver oxide films deposited using direct-current reactive magnetron sputtering
Authors:Gao Xiao-Yong  Zhang Zeng-Yuan  Ma Jiao-Min  Lu Jing-Xiao  Gu Jin-Hua and Yang Shi-E
Institution:The Key Lab of Materials Physics of Ministry of Education, School of Physics and Engineering, Zhengzhou University, Zhengzhou 450052, China
Abstract:This paper reports that a series of silver oxide (AgxO) films are deposited on glass substrates by direct-current reactive magnetron sputtering at a substrate temperature of 250 oC and an oxygen flux ratio of 15:18 by modifying the sputtering power (SP). The AgxO films deposited apparently show a structural evolution from cubic biphased (AgO + Ag2O) to cubic single-phased (Ag2O), and to biphased (Ag2O + AgO) structure. Notably, the cubic single-phased Ag2O film is deposited at the SP = 105 W and an AgO phase with <220> orientation discerned in the AgxO films deposited using the SP > 105 W. The transmissivity and reflectivity of the AgxO films in transparent region decrease with the increase the SP, whereas the absorptivity inversely increases with the increase of the SP. These results may be due to the structural evolution and the increasing film thickness. A redshift of the films' absorption edges determined in terms of Tauc formula clearly occurs from 3.1 eV to 2.73 eV with the increase of the SP.
Keywords:AgxO film  direct-current reactive magnetron sputtering  x-ray diffraction  optical properties
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