GHz波段nH量级两种平面圆形螺旋电感性能比较

以硅衬底螺旋电感(SIOS)的紧凑集总模型为基础,借助任意三维无源器件全波电磁(EM)场仿真器HFSS(High Frequency Structure Simulator),对差分对称圆形、普通平面圆形两种螺旋电感进行了对比研究.结果表明:品质因数(QF)和3 dB带宽(BW)前者明显优于后者,电感值L后者明显优于后者,自激振荡频率(SRF)两者基本相当.采用文中参数,前者较后者QF提高146.1%,SRF提高31.9%,但后者L值能达到前者3倍以上.模拟结果与理论分析相吻合.

Performance Comparison of Differential Symmetric and Planar Circular Spiral Inductors

Based on the typical lumped equivalent-circuit model of spiral inductor on silicon(SIOS) for RF integrated circuit(RFIC), differential symmetric and common planar circular spiral inductors have been simulated and computed by using the Ansoft software HFSS which is a high-performance full-wave electromagnetic(EM) field simulator.Numerical analysis declares that the former is better than the latter in quality factor(QF) and in 3dB BW but value L is contrary. Their self-resonant frequency(SRF) are approximately equal. Experimental results show that compared to the latter, the former gives a 146.1% increase in the maximum QF and 31.9% increase in the SRF while the latter can supply over 3 times large in value L of the peak Q. Simulation results have good agreements with the theoretical analysis. Several design guidelines are presented.