Chemical vapor deposition synthesis of self-aligned carbon nanotube arrays |
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Authors: | Stephan P Turano Jud Ready |
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Institution: | (1) Georgia Tech Research Institute, 30332 Atlanta, GA |
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Abstract: | A procedure for producing arrays of self-aligned carbon nanotubes (CNTs) using standard chemical vapor deposition (CVD) is
reported. Using UV photolithography, silicon substrates are patterned with a thin layer of thermally evaporated iron as a
CNT catalyst. The CVD synthesis was carried out over a small temperature range (700°C–800°C) using acetylene and methane gasses,
producing aligned CNT towers. Scanning electron microscopy (SEM) analysis shows a relationship between CNT tower height and
synthesis time. Additionally, results show that impurity particles dramatically effect CNT tower growth. These results indicate
that aligned CNTs can be produced in a desired pattern with height control. |
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Keywords: | Carbon nanotubes chemical vapor deposition aligned carbon nanotubes nanotube towers silicon substrates |
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