中红外完全带隙Si反蛋白石光子晶体的制备与光学性能研究

通过溶剂蒸发对流自组装法制备SiO2胶体晶体,采用低压化学气相沉积法填充Si,制备得到Si反蛋白石(opal)三维光子晶体.采用扫描电子显微镜对Si反opal的显微形貌进行表征,采用平面波展开法理论模拟Si反opal的光子带隙,采用傅里叶变换红外光谱仪测试其光学性能.研究结果表明:Si在SiO2微球空隙内填充致密均匀,显微红外光谱测试的光子带隙反射峰位置及带宽与理论计算基本符合.变角度反射光谱测试表明,Si反opal沿不同角度入射时在中心波长3319nm处均存在明显的反射峰,证明其具有完全光子带隙,带隙位于中红外大气窗口区域.

Fabrication of silicon inverse opal photonic crystal with a complete photonic band gap in mid infrared range and its optical properties

SiO₂ colloidal crystal template was fabricated by the solvent vaporization convection self-assembly method. The low pressure chemical vapor deposition method was then used to fill the voids of the silica colloidal crystal template with high refractive index silicon, thus silicon inverse opal photonic crystal was obtained. The modality structure silicon inverse opal was characterized by scanning electron microscopy. Its photonic bandgap structure was calculated based on plane wave expansion method. Its photonic bandgap properties were characterized by Fourier transform infrared spectroscopy. The results showed that silicon is homogeneously distributed inside the voids of silica template. The wavelength and bandwidth of photonic bandgap measured by microscopic infrared spectrometer agree with the calculated one. The tilt-angle reflectance spectra along the different incidence angles showed that the refection peaks with the band center wavelength of 3319 nm always existed. This result proved that silicon inverse opal has the complete photonic bandgap. The bandgap lies in the range of mid infrared atmosphere window.