Design of novel three port optical gates scheme for the integration of large optical cavity electroabsorption modulators and evanescently-coupled photodiodes |
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Authors: | Liao Zai-Yi Yang Hua and Wang Wei |
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Institution: | State Key Laboratory on Integrated Optoelectronics and Key
Laboratory of Semiconductors Materials of
Chinese Academy of Sciences, Institute of Semiconductors, Chinese
Academy of Sciences, Beijing 100083,
China |
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Abstract: | This paper presents a novel scheme to monolithically integrate an
evanescently-coupled uni-travelling carrier photodiode with a planar
short multimode waveguide structure and a large optical cavity
electroabsorption modulator based on a multimode waveguide structure.
By simulation, both electroabsorption modulator and photodiode show
excellent optical performances. The device can be fabricated with
conventional photolithography, reactive ion etching, and chemical wet
etching. |
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Keywords: | electro-absorption modulator uni-carrier photodiode beam propagation
method monolithic integration |
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