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Spectroscopic studies of ArF laser photoablation of PMMA |
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| Authors: | G. M. Davis M. C. Gower C. Fotakis T. Efthimiopoulos P. Argyrakis |
| Affiliation: | (1) Clarendon Laboratory, Oxford University, Parks Road, Oxford, Oxon, England;(2) Laser Division SERC Rutherford Appleton Laboratory, Chilton Didcot, Oxon, England;(3) Research Centre of Crete and Department of Physics, University of Crete, Heraklion, Crete, Greece |
| Abstract: | A Spectroscopic study has been made of the emission spectra arising from ArF laser initiated photoablation of PMMA samples. This process leads to direct etching of the polymer. The thermal temperature of the CH fragment species in the plume immediately above the ablated site was found to be  3200 ±200 K. The translational velocity of this species was found to be 4.2×105 cm/s corresponding to a translational temperature of 11,000 K. These results are consistent with a rapid direct bond scission model for ablation. |
| Keywords: | 82.50 33 |
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