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微波低噪声晶体管电磁脉冲敏感端对研究
引用本文:杨洁,王长河,刘尚合,LIU Shang-he.微波低噪声晶体管电磁脉冲敏感端对研究[J].强激光与粒子束,2007,19(1):99-102.
作者姓名:杨洁  王长河  刘尚合  LIU Shang-he
作者单位:1. 军械工程学院 静电与电磁防护研究所, 石家庄 050003; 2. 中国电子科技集团公司 第十三研究所, 石家庄 050000
摘    要: 在研究电磁脉冲对微电子器件作用效应的过程中,针对三种不同型号的微波低噪声硅半导体器件进行了电磁脉冲(静电放电和方波电磁脉冲)直接注入的试验,结果发现该类器件对电磁脉冲最敏感的端对并不是EB结(发射极-基极),而是CB结(集电极-基极)。通过对器件结构与放电过程的分析,分别得出了CB结、EB结的损伤机理:随放电电压的增大,热载流子撞击界面,使流经界面处的少数载流子复合速度增加,少数载流子在界面处及界面附近被复合,从而降低了器件的电流放大系数。而无论从哪个结注入,器件完全失效均是由热二次击穿造成。从而更进一步地证明了CB结比EB结更敏感。

关 键 词:微波低噪声硅晶体管  静电放电  方波电磁脉冲  损伤电压  损伤机理
文章编号:1001-4322(2007)01-0099-04
收稿时间:2006/4/20
修稿时间:2006-04-202006-11-20

Electromagnetic pulse sensitive ports of micro-wave low-noise transistors
LIU Shang-he.Electromagnetic pulse sensitive ports of micro-wave low-noise transistors[J].High Power Laser and Particle Beams,2007,19(1):99-102.
Authors:LIU Shang-he
Institution:1. Electrostatic and Electromagnetic Protection Institute, Mechanical Engineering College, Shijiazhuang 050003, China; 2. The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang 050000, China
Abstract:During the experiments on electromagnetic pulse(EMP) action utility of micro-electronic components,aimed at three kinds of micro-wave low-noise silicon dynatron transistors,positive EMP(including ESD and square-wave EMP) stresses were injected into all the combinations(CB,BC,CE,EC,EB and BE).Through recording and comparing the damaged voltage of each injected combination,it can be found that the most sensitive port to EMP of micro-wave low-noise transistors is not EB(emitter-base) but CB(collector-base).By analyzing the device fabric and the process of discharge,the failure mechanism of CB and EB is separately determined.So it makes clear that CB is more sensitive to EMP than EB.
Keywords:Micro-wave low-noise transistor  ESD  Square-wave EMP  Damage voltage  Damage mechanism
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