Spectroscopic Measurements of Plasma Temperatures in a Radio Frequency Discharge |
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| Authors: | Z Tomasik W ?yrnicki |
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| Institution: | Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Technical University of Wroc?aw , 50-370, Wroc?aw, Poland |
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| Abstract: | Argon and mixtures of argon with CH4, C2H2 and N2 have been excited in a 27.2 MHz radio frequency discharge at pressures of 10 and 5 Torr. Plasma spectra have been recorded and analyzed. The excitation temperatures of Ar I and H, the C2 and CN vibrational temperatures and the N2 and CN rotational temperatures have been determined and discussed. |
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| Keywords: | plasma temperature excitation temperature vibrational temperature rotational temperature radio frequency discharge |
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