Laser Optogalvanic Analysis of Nitrogen Layers in Hollow Cathode Glow Discharge |
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| Authors: | R. Djulgerova V. Mihailov |
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| Affiliation: | Institute of Solid State Physics-BAS , Blvd. Trakia 72, Sofia, 1784, Bulgaria |
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| Abstract: | This experimental investigation shows that the replacement of the spectral line intensity by the optogalvanic and photoelectric optogalvanic signals improves the accuracy of the classical direct layer-by-layer analysis in a hollow cathode glow discharge and its possibilities, for example for layer thickness measurements in some cases. |
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| Keywords: | hollow cathode discharge optogalvanic effect photoelectric optogalvanic effect layer and surface analysis |
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