| 全自动光刻机的同步控制方法 |
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| 引用本文： | 宋丽娟,宫晨.全自动光刻机的同步控制方法[J].电子工业专用设备,2013(11):50-53. |
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| 作者姓名： | 宋丽娟 宫晨 |
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| 作者单位： | 中国电子科技集团公司第四十五研究所 |
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| 摘 要： | 对于一种包含多个相对独立又彼此干涉机构的全自动光刻机，设计合理的控制方法才能使各个机构高效而稳定地协同工作。按照机械结构将设备划分为4个控制对象，采用同步控制方法使这4个对象实现并行工作。这种控制方法相对于顺序执行工艺流程的方式，极大地提高了设备的运行效率。而且，这种同步控制方法也可适用于具有类似控制要求的其他设备。
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| 关 键 词： | 多机械手 同步控制 全自动光刻机 |
The Synchronous Control Method for A Type of Automatic Mask Aligner |
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| SONG Lijuan;GONG Chen.The Synchronous Control Method for A Type of Automatic Mask Aligner[J].Equipment for Electronic Products Marufacturing,2013(11):50-53. |
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| Authors: | SONG Lijuan;GONG Chen |
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| Institution: | SONG Lijuan;GONG Chen;The 45th Research Institute of CETC; |
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| Abstract: | For a contains several relatively independent and mutual interference mechanism of automatic mask aligner, designs reasonable control methods to make efficient and stable institutions to work together. According to the mechanical structure could be divided into four control objects, adopts synchronize control method for parallel work of these four objects. This control method is compared with the sequential execution of process, greatly improves the efficiency of equipment. Moreover, the synchronize control method also can be applied to other equipment with similar control requirement. |
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| Keywords: | Multi-manipulator Synchronize control Automatic mask aligner |
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