Applications of Moiré topography measurement methods in industry |
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Authors: | Masane Suzuki and Motonori Kanaya |
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Affiliation: | Fuji Photo Optical Co. Ltd, 1-324, Uetake-Cho, Omiya, Saitama-Prefecture, Japan |
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Abstract: | Moiré topography is able to determine the shape of an object, by pattern measuring, in a short time. Recently moiré topography has been used in various industrial fields because it has superior features that point measurement doesn't have. As it becomes popular various related techniques that fit specific needs have been developed and there is the prospect that moiré topography will become a more important measurement method and strengthen its position in the near future. This paper explains the grid irradiation method and the grid projection method as the basis of the moiré topography measurement method and describes the existing status and prospects of utilizing moiré topography measurement in the applied fields of shape measurement, flatness measurement and detection of abnormality. |
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