|
|||||
|
|
| Novel Method for Making MicroopticsElements with Continuous Relief | |
| 作者姓名： | CHEN Bo GUO Lurong TANG Jiyue GUO Yongkang ZHOU Mingbao |
| 作者单位： | CHEN Bo:Information Optics Research Center, Sichuan University, Chengdu 610064 GUO Lurong:Information Optics Research Center, Sichuan University, Chengdu 610064 TANG Jiyue:Information Optics Research Center, Sichuan University, Chengdu 610064 GUO Yongkang:Information Optics Research Center, Sichuan University, Chengdu 610064 ZHOU Mingbao:The State Key Lab. of optical technologies on microfabrication, Institute of Optics & Electronics, Chinese Academy of Sciences, Chengdu 610064 |
| 基金项目： | Supported by the National Eduction Commission Docto_al Foundation and National Natural Scionce Foundation of China. |
| 摘 要： | l.IntroductionMicroopticselementshasacceptedsPecialinterestingforitsabilityofgeneratearbi-trarydiffractionwave-front.BinarymethodhasbeencommonlyusedtomakeMOE,thismethodisengagedseveralmasksandseveraltimesofetchingtoapproachacontinuousre-lief,averyhighaccuracyofa1ignmentisrequried,theprocessingiscomp1exandtimeconsuming.ThereareseveralotherwaystofabricateMoEwithcontinuousreIief.Oneisholcagraphicrecording,thismethodcanproduceMoEwithlarSearea,butthefataldefectisthelowerdiffractionefficiency.A… |
| 收稿时间： | 1995/12/25 |
Novel Method for Making Microoptics Elements with Continuous Relief |
|
| CHEN Bo,GUO Lurong,TANG Jiyue,GUO Yongkang,ZHOU Mingbao.Novel Method for Making MicroopticsElements with Continuous Relief[J].中国激光(英文版),1997,6(1):57-63. | |
| Abstract: | We intreduce the moving-mask method for fabrication of microoptics elements(MOE) with continuous relief in this paper. With only one mask engaged, we obtained a continuous relief with line-symmety or rotation-symmetry several kinds of MOE have been made by using this method such as blazcd grating, parabolic grating, cylindrical lens, et al., experimental results are given. |
| Keywords: | moving-mask microoptics elements continuous relief |