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Fast formation of thick and transparent titania nanotubular films from sputtered Ti
Authors:Haidong Zheng  Abu Z. Sadek  Michael Breedon  David Yao  Kay Latham  Johan du Plessis  Kourosh Kalantar-Zadeh
Affiliation:1. School of Electrical and Computer Engineering, RMIT University, Melbourne 3001, Australia;2. School of Applied Sciences, Applied Chemistry, RMIT University, Melbourne 3001, Australia;3. School of Applied Sciences, Applied Physics, RMIT University, Melbourne 3001, Australia
Abstract:Ti films sputtered on transparent fluorine-doped tin oxide glass substrates were anodized in fluoride-containing organic electrolyte in the presence of H2O. In this work, anodic TiO2 nanotubes (ATNs) as long as 9.2 ± 0.3 μm were obtained with high growth rate of 0.64 ± 0.3 μm min?1. We demonstrated the optimum anodization conditions for ATN growth on foreign substrates, were within the range of 0.3–0.5% (wt) NH4F, with 3–5% (vol) H2O at 60 V. XPS and ICP-MS were utilized to elucidate the increase of thickness and volume expansion obtained from the sputtered Ti film to their ATN forms. The ATN films exhibited excellent uniformity and adhesion to the substrates.
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